Tantalum target material is a material made of high-purity tantalum metal or tantalum alloy, mainly used in various thin film deposition processes. Tantalum target materials are renowned for their excellent corrosion resistance, high melting point, and biocompatibility, and are widely used in various high-tech fields such as electronics, semiconductors, anti-corrosion coatings, and medical equipment.
Physical and chemical properties
The main physical properties of tantalum target materials include:
Melting point: 3290K (3017 ° C)
Boiling point: 5731K (5458 ° C)
Density: 16.68g/cm ³
Hardness: High hardness, with ductility and corrosion resistance
Chemical stability: Tantalum does not react with aqua regia and is suitable for manufacturing chemical equipment and medical devices
Preparation method
The preparation method of tantalum target material usually includes the following steps:
1. Powder metallurgy: Tantalum powder with a particle size of 2-3 microns is produced using the sodium thermal reduction method.
2. Cold isostatic pressing: tantalum powder is subjected to cold isostatic pressing in a latex jacket, with a pressure greater than 200 MPa and a holding time greater than 20 minutes.
3. Sintering: Sintering is carried out under conditions of vacuum degree greater than 1 * 10 ^ -2MPa and temperature greater than 2400 ° C, with a holding time greater than 1.5 hours.
4. Rolling and heat treatment: The sintered tantalum billet is rolled and heat treated to obtain the tantalum target material.
application area
The application fields of tantalum target materials are very wide, mainly including:
1. Electronics and semiconductor industry: Used as a barrier material in integrated circuit manufacturing, especially in copper interconnect technology, tantalum's high melting point and low resistance make it an ideal choice.
2. Anti corrosion coating: Due to the excellent corrosion resistance of tantalum, it is used to coat chemical equipment and metal surfaces exposed to extreme environments, extending the service life of equipment.
3. Optical and optoelectronic thin films: Tantalum targets can be used to manufacture thin films with specific optical properties, widely used in optical devices, displays, and sensors.
4. Medical equipment: Tantalum has good biocompatibility and is suitable for coating medical implants such as bone plates and joint prostheses, reducing human rejection reactions.
