The difference between zirconium target and titanium target!


Zirconium targets and titanium targets, as important target materials in the field of sputtering coating, have significant differences in material properties, application scenarios, and performance:

1. Comparison of material characteristics

①. Zirconium target

Melting point: 1852 ℃;

Density: 6.49 g/cm ³;

Corrosion resistance: extremely strong, especially resistant to acid and alkali;

Thermal neutron absorption: low cross-section, suitable for the nuclear industry;

Biocompatibility: Low allergy rate, suitable for medical implantation.

②. Titanium target

Melting point: 1668 ℃; ‌

Density: 4.506 g/cm ³;

Corrosion resistance: good, dependent on surface oxide film;

Thermal neutron absorption: Not applicable;

Biocompatibility: High, but may cause type IV allergies.

2. Core application areas

Zirconium target:

Nuclear industry: nuclear reactor cladding coatings, fuel elements;

Optical components: anti reflective film, high dielectric constant material;

Corrosion resistant coating: protection for chemical equipment.

Titanium target:

Semiconductors: barrier layer, electrode material;

Decorative coating: PVD gold coating, architectural glass;

Medical and health equipment: artificial joints, implants.

3. Performance comparison

Corrosion resistance: Zirconium targets perform better in strong acid/alkali environments, while titanium targets rely on oxide film protection.

Cost: Titanium target raw materials are easier to obtain and have lower prices; Zirconium targets have a higher cost due to nuclear grade requirements.

Thermal conductivity: Zirconium targets have better heat dissipation performance and are suitable for high-power devices.