Zirconium targets and titanium targets, as important target materials in the field of sputtering coating, have significant differences in material properties, application scenarios, and performance:
1. Comparison of material characteristics
①. Zirconium target
Melting point: 1852 ℃;
Density: 6.49 g/cm ³;
Corrosion resistance: extremely strong, especially resistant to acid and alkali;
Thermal neutron absorption: low cross-section, suitable for the nuclear industry;
Biocompatibility: Low allergy rate, suitable for medical implantation.
②. Titanium target
Melting point: 1668 ℃;
Density: 4.506 g/cm ³;
Corrosion resistance: good, dependent on surface oxide film;
Thermal neutron absorption: Not applicable;
Biocompatibility: High, but may cause type IV allergies.
2. Core application areas
Zirconium target:
Nuclear industry: nuclear reactor cladding coatings, fuel elements;
Optical components: anti reflective film, high dielectric constant material;
Corrosion resistant coating: protection for chemical equipment.
Titanium target:
Semiconductors: barrier layer, electrode material;
Decorative coating: PVD gold coating, architectural glass;
Medical and health equipment: artificial joints, implants.
3. Performance comparison
Corrosion resistance: Zirconium targets perform better in strong acid/alkali environments, while titanium targets rely on oxide film protection.
Cost: Titanium target raw materials are easier to obtain and have lower prices; Zirconium targets have a higher cost due to nuclear grade requirements.
Thermal conductivity: Zirconium targets have better heat dissipation performance and are suitable for high-power devices.