What are the target materials? Target is actually a broad concept, and there are three classification methods for target materials: 1. According to their external dimensions, they can be divided into cylindrical, rectangular, square plate targets, and tube targets; 2. Target materials can be divided into conventional metal target materials, precious metal target materials, rare earth metal target materials, non-metallic target materials, alloy sputtering target materials, ceramic sputtering target materials, etc; 3. According to the application field, it can be divided into semiconductor target materials, display panel target materials, solar cell target materials, magnetic recording target materials, etc.

Classified by target material shape:

Common target materials are mostly square targets and round targets, both of which are solid target materials. In the coating operation, the magnetic field generated by the circular permanent magnet on the surface of the target material is circular, which can cause uneven erosion. The thickness uniformity of the sputtered film is poor, and the utilization efficiency of the target material is only about 20% to 30%. The currently promoted hollow tube target can rotate around a fixed strip magnet component for a certain period of time, and the 360 ° target surface can be uniformly etched, which has obvious advantages and increases the utilization rate to 80%.

Classified by target material:

Conventional metal target materials:

Aluminum target Al, copper target Cu, chromium target Cr, barium target Ba, bismuth target Bi, cadmium target Cd, zirconium target Zr, zinc target Zn, nickel target Ni, cobalt target Co, calcium target Ca, niobium target Nb, indium target In, tungsten target W, molybdenum target Mo, vanadium target V, iron target Fe, titanium target Ti, hafnium target Hf, yttrium target Y, tantalum target Ta, lithium target Li, magnesium target Mg, tin target Sn, manganese target Mn, lead target Pb, silicon target Si, aluminum target Al, beryllium target Be, copper target Cu, scandium target Sc

Precious metal target material:

Silver target Ag, gold target Au, platinum target Pt, palladium target Pd, rhodium target Rh, iridium target Ir, rhenium target Re, ruthenium target Ru

Rare earth metal target material:

Lanthanum target La, cerium target Ce, praseodymium target Pr, neodymium target Nd, samarium target Sm, europium target Eu, gadolinium target Gd, terbium target Tb, dysprosium target Dy, holmium target Ho, erbium target Er, thulium target Tm, ytterbium target Yb, lutetium target Lu

Non metallic target material:

Graphite target material C, boron target material B, germanium target material Ge, selenium target material Se, antimony target material Sb, tellurium target material Te

Alloy sputtering target material:

Titanium aluminum alloy target TiAl, titanium tungsten alloy target TiW, tungsten nickel alloy target WNi, nickel chromium alloy target NiCr, nickel titanium alloy target NiTi, nickel vanadium alloy target NiV, nickel iron alloy target NiFe, iron cobalt nickel niobium alloy target FeCoNiNb, cobalt iron boron alloy target CoFeB, iron manganese alloy target FeMn, iron gallium alloy target FeGa, copper gallium alloy target CuGa, manganese gallium alloy target MnGa, tungsten rhenium alloy target WRe, iridium manganese alloy target IrMn, copper indium gallium selenide alloy target CIGS, molybdenum rhenium alloy target MoRe, indium tin alloy target InSn, gold tin alloy target AuSn, gold germanium nickel alloy target AuGeNi Gold germanium alloy target AuGe, zinc aluminum alloy target ZnAl, aluminum copper alloy target AlCu, zirconium titanium alloy target ZrTi, copper zinc tin sulfur alloy target CZTS, cobalt niobium zirconium alloy target CoNbZr, cobalt tantalum zirconium alloy target CoTaZr, terbium cobalt alloy target TbCo TbFeCo, a terbium iron cobalt alloy

Classified by target material application field:

1. Subdivision of Semiconductor Application Fields

Electrode and wiring film (aluminum target, copper target, gold target, silver target, palladium target, platinum target, aluminum silicon alloy target, aluminum silicon copper alloy target, etc.);

Storage electrode thin film (molybdenum target, tungsten target, titanium target, etc.); Adhesive film (tungsten target, titanium target, etc.); Capacitor insulation film thin film (lead zirconate titanate target material, etc.).

2. Subdivision of magnetic recording application fields

Vertical magnetic recording film (cobalt chromium alloy target material, etc.); Hard disk film (cobalt chromium tantalum alloy target, cobalt chromium platinum alloy target, cobalt chromium tantalum platinum alloy target, etc.);

Thin film magnetic head (cobalt tantalum chromium alloy target, cobalt chromium zirconium alloy target, etc.); Artificial crystal thin film: (cobalt platinum alloy target, cobalt palladium alloy target, etc.).

3. Subdivision of Optical Recording Application Fields

Phase change optical disc recording film (tellurium selenide target, antimony selenide target, germanium antimony tellurium alloy target, germanium tellurium alloy target, etc.); Magneto optical disc recording film (dysprosium iron cobalt alloy target, terbium dysprosium iron alloy target, terbium iron cobalt alloy target, alumina target, magnesium oxide target, silicon nitride target, etc.); Optical disc reflective film (aluminum target, aluminum titanium alloy target, aluminum chromium alloy target, gold target, gold alloy target, etc.). Optical disc protection film (silicon nitride target, silicon oxide target, zinc sulfide target, etc.).

4. Subdivision of Display Panel Application Fields

Transparent conductive film (indium tin oxide target, zinc aluminum oxide target, etc.); Electrode wiring thin film (molybdenum target, tungsten target, titanium target, tantalum target, chromium target, aluminum target, aluminum titanium alloy target, aluminum tantalum alloy target, etc.) electroluminescent thin film (zinc sulfide doped manganese target, zinc sulfide doped terbium target, calcium sulfide doped europium target, yttrium oxide target, tantalum oxide target, barium titanate target, etc.).

5. Other application areas segmentation

Decorative films (titanium target, zirconium target, chromium target, titanium aluminum alloy target, stainless steel target, etc.);

Low resistance thin films (nickel chromium alloy targets, nickel chromium silicon alloy targets, nickel chromium aluminum alloy targets, nickel copper alloy targets, etc.); Superconducting thin films (yttrium barium copper oxide targets, bismuth strontium calcium copper oxide targets, etc.);

Tool plating film (nitride target, carbide target, boride target, chromium target, titanium target, titanium aluminum alloy target, zirconium target, graphite target, etc.).